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## Fault Detection Considerations in Silicon Based MEMS Resonators by Observing Changes in Dynamic Behaviour

#### S. Ikizoğlu [1] , M. Akyol [2]

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This study is about fault detection in siliconbased MEMS resonators. The main idea in finding out the failure is to establish a proper relationship between the mechanical structure and its electrical equivalent and prosecuting related measurements. In order to determine the type of defect, the electrical equivalent circuit is referenced considering the parasitic effects. Among various possible faults cracks in the beam and particle adhesion are selected to verify the validity of the approach. Simulations are carried out to study the effect of defects on the resonance frequency and amplitude. Results coincide greatly with those of similar investigations giving motivation for further studies to penetrate deep into the matter, thus not being restricted with defining the trouble, but even locate the failure
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Primary Language en Articles Author: S. Ikizoğlu Author: M. Akyol
 Bibtex @ { bajece46446, journal = {Balkan Journal of Electrical and Computer Engineering}, issn = {2147-284X}, address = {Balkan Yayın}, year = {2014}, volume = {2}, pages = {34 - 38}, doi = {10.17694/bajece.13449}, title = {Fault Detection Considerations in Silicon Based MEMS Resonators by Observing Changes in Dynamic Behaviour}, key = {cite}, author = {Ikizoğlu, S. and Akyol, M.} } APA Ikizoğlu, S , Akyol, M . (2014). Fault Detection Considerations in Silicon Based MEMS Resonators by Observing Changes in Dynamic Behaviour. Balkan Journal of Electrical and Computer Engineering, 2 (1), 34-38. DOI: 10.17694/bajece.13449 MLA Ikizoğlu, S , Akyol, M . "Fault Detection Considerations in Silicon Based MEMS Resonators by Observing Changes in Dynamic Behaviour". Balkan Journal of Electrical and Computer Engineering 2 (2014): 34-38 Chicago Ikizoğlu, S , Akyol, M . "Fault Detection Considerations in Silicon Based MEMS Resonators by Observing Changes in Dynamic Behaviour". Balkan Journal of Electrical and Computer Engineering 2 (2014): 34-38 RIS TY - JOUR T1 - Fault Detection Considerations in Silicon Based MEMS Resonators by Observing Changes in Dynamic Behaviour AU - S. Ikizoğlu , M. Akyol Y1 - 2014 PY - 2014 N1 - doi: 10.17694/bajece.13449 DO - 10.17694/bajece.13449 T2 - Balkan Journal of Electrical and Computer Engineering JF - Journal JO - JOR SP - 34 EP - 38 VL - 2 IS - 1 SN - 2147-284X- M3 - doi: 10.17694/bajece.13449 UR - https://doi.org/10.17694/bajece.13449 Y2 - 2019 ER - EndNote %0 Balkan Journal of Electrical and Computer Engineering Fault Detection Considerations in Silicon Based MEMS Resonators by Observing Changes in Dynamic Behaviour %A S. Ikizoğlu , M. Akyol %T Fault Detection Considerations in Silicon Based MEMS Resonators by Observing Changes in Dynamic Behaviour %D 2014 %J Balkan Journal of Electrical and Computer Engineering %P 2147-284X- %V 2 %N 1 %R doi: 10.17694/bajece.13449 %U 10.17694/bajece.13449 ISNAD Ikizoğlu, S. , Akyol, M. . "Fault Detection Considerations in Silicon Based MEMS Resonators by Observing Changes in Dynamic Behaviour". Balkan Journal of Electrical and Computer Engineering 2 / 1 (March 2014): 34-38. https://doi.org/10.17694/bajece.13449