Yıl 2009, Cilt 1, Sayı 4, Sayfalar 27 - 38 2009-12-01

Design, Modeling and Optimization of a Multilayer Thin-Film Pzt Diaphragm Used in Pressure Sensor

V. Mohammadi [1] , M. H. Sheikhi [2]

114 771

Multilayer thin-film PZT diaphragm has been designed and modeled. Commercial Finite element software, ANSYS was implemented to model the diaphragm. This multi-layer diaphragm can be used as both sensor and actuator. A simplified model is introduced to reduce the CPU time. Dynamic characteristics of the multilayer diaphragm have been investigated. The important parameters of the multilayer PZT diaphragm have been optimized to improve the performance of a pressure sensor using APDL macro. Some simple relation was found which can be used to predict the PZT layer characteristics in larger model with more elements
Finite Element, ANSYS®, MEMS Pressure Sensors, Multilayer Thin Film PZT Diaphragm, Piezoelectric
  • [1] Liu, M., Cui, T., Dong, W., Cuil, Y., Wang, J., Du, L., and Wang, L., Piezoelectric microcantilevers with two PZT thin-film elements for microsensors and microactuators, Proceedings of the 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2006, Zhuhai, China, 2006.
  • [2] Liwei Lin, L., and Yun, W., MEMS Pressure Sensors for Aerospace Applications, IEEE, 1998.
  • [3] Ravariu, F., Ravariu, C., Nedelcu, O., The modeling of a sensor for the human blood pressure, IEEE, 2002.
  • [4] Zinck, C., Pinceau, D., Defaÿ, E., Delevoye, E., Barbier, D. Development and characterization of membranes actuated by a PZT thin film for MEMS applications, Sensors and Actuators, A 115 483–489, 2004.
  • [5] ANSYS guide, release 10.0, ANSYS, Inc. http://www.ansys.com.
  • [6] Lin-Quan Yao, Li Lu, Simplified Model and Numerical Analysis of Multi-layered Piezoelectric Diaphragm, Advanced Materials for Micro- and Nano- Systems (AMMNS), 2003
  • [7] Shuo Hung Chang, Yi Chung Tung, Electro-Elastic Characteristics of Asymmetric Rectangular Piezoelectric Laminae, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, vol. 46, no. 4, july 1999
Konular
Diğer ID JA65GN93CS
Dergi Bölümü Makaleler
Yazarlar

Yazar: V. Mohammadi

Yazar: M. H. Sheikhi
Kurum: ?

Bibtex @ { ijeas251096, journal = {International Journal Of Engineering \& Applied Sciences}, issn = {}, eissn = {1309-0267}, address = {Akdeniz Üniversitesi}, year = {2009}, volume = {1}, pages = {27 - 38}, doi = {}, title = {Design, Modeling and Optimization of a Multilayer Thin-Film Pzt Diaphragm Used in Pressure Sensor}, key = {cite}, author = {Mohammadi, V. and Sheikhi, M. H.} }
APA Mohammadi, V , Sheikhi, M . (2009). Design, Modeling and Optimization of a Multilayer Thin-Film Pzt Diaphragm Used in Pressure Sensor. International Journal Of Engineering & Applied Sciences, 1 (4), 27-38. Retrieved from http://dergipark.gov.tr/ijeas/issue/23572/251096
MLA Mohammadi, V , Sheikhi, M . "Design, Modeling and Optimization of a Multilayer Thin-Film Pzt Diaphragm Used in Pressure Sensor". International Journal Of Engineering & Applied Sciences 1 (2009): 27-38 <http://dergipark.gov.tr/ijeas/issue/23572/251096>
Chicago Mohammadi, V , Sheikhi, M . "Design, Modeling and Optimization of a Multilayer Thin-Film Pzt Diaphragm Used in Pressure Sensor". International Journal Of Engineering & Applied Sciences 1 (2009): 27-38
RIS TY - JOUR T1 - Design, Modeling and Optimization of a Multilayer Thin-Film Pzt Diaphragm Used in Pressure Sensor AU - V. Mohammadi , M. H. Sheikhi Y1 - 2009 PY - 2009 N1 - DO - T2 - International Journal Of Engineering & Applied Sciences JF - Journal JO - JOR SP - 27 EP - 38 VL - 1 IS - 4 SN - -1309-0267 M3 - UR - Y2 - 2018 ER -
EndNote %0 International Journal Of Engineering & Applied Sciences Design, Modeling and Optimization of a Multilayer Thin-Film Pzt Diaphragm Used in Pressure Sensor %A V. Mohammadi , M. H. Sheikhi %T Design, Modeling and Optimization of a Multilayer Thin-Film Pzt Diaphragm Used in Pressure Sensor %D 2009 %J International Journal Of Engineering & Applied Sciences %P -1309-0267 %V 1 %N 4 %R %U
ISNAD Mohammadi, V. , Sheikhi, M. H. . "Design, Modeling and Optimization of a Multilayer Thin-Film Pzt Diaphragm Used in Pressure Sensor". International Journal Of Engineering & Applied Sciences 1 / 4 (Aralık 2009): 27-38.