Yıl 2009, Cilt 1, Sayı 4, Sayfalar 40 - 50 2009-12-01

Axial Density Profile of 27 Mhz Capacitively Coupled Rf Plasma; Power and Pressure Dependence

S. Helhel [1]

159 222

Axial density profiles of Confined Capacitively Coupled Plasma (CCCP) are measured for different pressure and power levels with a microwave interferometer. Abel inversion is used to deduce radial density profiles, which show that density diffuses from center to the quartz tube walls and indicate different density profiles depending on the pressure and power. The preheat like potential drop from center to close to the boundary edge is approximately twice the electron temperature, while the density drops approximately five to eight times
Plasma density, Microwave interferometer, Confined Capacitively Coupled Plasma, Pre-sheath
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Konular
Diğer ID JA65GR22HV
Dergi Bölümü Makaleler
Yazarlar

Yazar: S. Helhel
Kurum: ?

Bibtex @ { ijeas251100, journal = {International Journal Of Engineering \& Applied Sciences}, issn = {}, eissn = {1309-0267}, address = {Akdeniz Üniversitesi}, year = {2009}, volume = {1}, pages = {40 - 50}, doi = {}, title = {Axial Density Profile of 27 Mhz Capacitively Coupled Rf Plasma; Power and Pressure Dependence}, key = {cite}, author = {Helhel, S.} }
APA Helhel, S . (2009). Axial Density Profile of 27 Mhz Capacitively Coupled Rf Plasma; Power and Pressure Dependence. International Journal Of Engineering & Applied Sciences, 1 (4), 40-50. Retrieved from http://dergipark.gov.tr/ijeas/issue/23572/251100
MLA Helhel, S . "Axial Density Profile of 27 Mhz Capacitively Coupled Rf Plasma; Power and Pressure Dependence". International Journal Of Engineering & Applied Sciences 1 (2009): 40-50 <http://dergipark.gov.tr/ijeas/issue/23572/251100>
Chicago Helhel, S . "Axial Density Profile of 27 Mhz Capacitively Coupled Rf Plasma; Power and Pressure Dependence". International Journal Of Engineering & Applied Sciences 1 (2009): 40-50
RIS TY - JOUR T1 - Axial Density Profile of 27 Mhz Capacitively Coupled Rf Plasma; Power and Pressure Dependence AU - S. Helhel Y1 - 2009 PY - 2009 N1 - DO - T2 - International Journal Of Engineering & Applied Sciences JF - Journal JO - JOR SP - 40 EP - 50 VL - 1 IS - 4 SN - -1309-0267 M3 - UR - Y2 - 2018 ER -
EndNote %0 International Journal Of Engineering & Applied Sciences Axial Density Profile of 27 Mhz Capacitively Coupled Rf Plasma; Power and Pressure Dependence %A S. Helhel %T Axial Density Profile of 27 Mhz Capacitively Coupled Rf Plasma; Power and Pressure Dependence %D 2009 %J International Journal Of Engineering & Applied Sciences %P -1309-0267 %V 1 %N 4 %R %U
ISNAD Helhel, S. . "Axial Density Profile of 27 Mhz Capacitively Coupled Rf Plasma; Power and Pressure Dependence". International Journal Of Engineering & Applied Sciences 1 / 4 (Aralık 2009): 40-50.