Yıl 2017, Cilt 22, Sayı 3, Sayfalar 61 - 80 2017-12-08

A Resonant MEMS Lorentz Force Based Magnetometer with Amplitude Detection
LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE

Kıvanç AZGIN [1]

183 182

This study presents a Lorentz force magnetometer based on vibration amplitude detection with a resonant MEMS load cell structure as a sensor. Magnetometer is composed of a DETF (Double-Ended Tuning Fork) resonator with comb type electrode and a grill structure formed by beams connected from their centers end ends. The grill structure reduces electrical resistance and prevents overheating while generating the Lorentz force. For maximum sensitivity, the maxima of the slope of the magnitude response is chosen for excitation frequency. The proposed sensor is fabricated using a standard SOI micromachining processes with a device layer thickness of 35 μm. The resonance frequency of the DETF is measured to be 63812,1 Hz, Q-factor of 5950 at around 0.2 mTorr ambient pressure. Tests are done for 30 mT magnetic field normal to the resonator plane, with the grill current of 100 mA and excitation amplitude of 70mV. The scale factor of the magnetometer is measured to be 113.7 mV/T with a resolution of  965 µT/Hz½.

Bu çalışmada titreşim genliği ölçümü ile çalışan Lorentz kuvveti tabanlı ve algılayıcısı tınlaşan MEMS yük hücresi olan bir manyetometre sunulmaktadır. Manyetometre, tarak elektrotlara sahip Çift Bağlı Diyapazon (ÇBD) bir tınlatıcı ile, uçlarından ve ortalarından birbirlerine bağlanmış kirişlerden oluşan bir ızgara yapısından oluşmaktadır. Izgara yapısı, üzerinden geçen akımla Lorentz kuvvetini oluştururken, elektriksel direncin ve yapının sıcaklığının yükselmesini engellemektedir. Maksimum hassasiyet için yapının genlik frekans tepkisinin eğiminin en büyük olduğu tahrik frekansı seçilmiştir. Manyetometre standart SOI (Yalıtkan-Üzeri-Silisyum) mikro-işleme teknikleri kullanılarak 35µm yapısal kalınlıkla üretilmiştir. Yapılan frekans tepkisi testinde ÇBD yapısının tınlaşım frekansının 63812,1 Hz ve 0,2 mTorr'daki kalite faktörünün de 5950 olduğu belirlenmiştir. Testler yapıya dik olarak oluşturulan 30mT manyetik alan altında, 100mA ızgara akımı ve 70mV tahrik genliği ile yapılmıştır. Manyetometrenin orantı katsayısı 113.7 mV/T ve duyarlılığı  965 µT/Hz½ olarak ölçülmüştür.
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Konular Mühendislik ve Temel Bilimler
Dergi Bölümü Araştırma Makaleleri
Yazarlar

Orcid: 0000-0002-1778-963X
Yazar: Kıvanç AZGIN
Kurum: Orta Doğu Teknik Üniversitesi
Ülke: Turkey


Bibtex @araştırma makalesi { uumfd325923, journal = {Uludağ University Journal of The Faculty of Engineering}, issn = {2148-4147}, eissn = {2148-4155}, address = {Uludağ Üniversitesi}, year = {2017}, volume = {22}, pages = {61 - 80}, doi = {10.17482/uumfd.325923}, title = {LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE}, key = {cite}, author = {AZGIN, Kıvanç} }
APA AZGIN, K . (2017). LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE. Uludağ University Journal of The Faculty of Engineering, 22 (3), 61-80. DOI: 10.17482/uumfd.325923
MLA AZGIN, K . "LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE". Uludağ University Journal of The Faculty of Engineering 22 (2017): 61-80 <http://dergipark.gov.tr/uumfd/issue/31375/325923>
Chicago AZGIN, K . "LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE". Uludağ University Journal of The Faculty of Engineering 22 (2017): 61-80
RIS TY - JOUR T1 - LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE AU - Kıvanç AZGIN Y1 - 2017 PY - 2017 N1 - doi: 10.17482/uumfd.325923 DO - 10.17482/uumfd.325923 T2 - Uludağ University Journal of The Faculty of Engineering JF - Journal JO - JOR SP - 61 EP - 80 VL - 22 IS - 3 SN - 2148-4147-2148-4155 M3 - doi: 10.17482/uumfd.325923 UR - http://dx.doi.org/10.17482/uumfd.325923 Y2 - 2017 ER -
EndNote %0 Uludağ University Journal of The Faculty of Engineering LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE %A Kıvanç AZGIN %T LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE %D 2017 %J Uludağ University Journal of The Faculty of Engineering %P 2148-4147-2148-4155 %V 22 %N 3 %R doi: 10.17482/uumfd.325923 %U 10.17482/uumfd.325923
ISNAD AZGIN, Kıvanç . "LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE". Uludağ University Journal of The Faculty of Engineering 22 / 3 (Aralık 2017): 61-80. http://dx.doi.org/10.17482/uumfd.325923